LOSOID CRL 68200
lntroduction
The lubricant described in this data sheet belongs to the LOSIMOL LOSOID Series.Especially developed for the requirements of the cleanroom technology (e.g. semiconductor manufacturing).This means that the cleanroom lubricants not only correspond to usual tribolo-gical characteristics but also to the specific requirements of cleanroom technology like number and size of particles .Therefore LOSIMOL Cleanroom Lubricants are classified according to these two items.
Clearoom Characteristics
The determination of the results of the particle emission behaviour and particle size distribution has been done under standardised conditions .A wafer positioning unit of a semiconductor inspection equipment served as a test stand.
General Technical Data Regarding LOSOID CRL 68200:
Penetration Worked(Consistency) semifluid
Apparent Dynamic Viscosity mp a.s(cp) abt.1.300cp
Ductility weak
Evaporation Loss 0.5% - 16h/70¡æ
Spreading Behaviour Sp = 260/70¡æ
Operating Temperature Range abt. -20¡æ/+85¡æ
Resistant Plastics PA .PC POM
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